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Freescale Semiconductor Technical Data
MPX5010 Rev 11, 01/2007
Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPX5010/MPXV5010G series piezoresistive transducers are state-ofthe-art monolithic silicon pressure sensors designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * 5.0% Maximum Error over 0 to 85C * Ideally Suited for Microprocessor or Microcontroller-Based Systems * Durable Epoxy Unibody and Thermoplastic (PPS) Surface Mount Package * Temperature Compensated over -40 to +125C * Patented Silicon Shear Stress Strain Gauge * Available in Differential and Gauge Configurations * Available in Surface Mount (SMT) or Through-hole (DIP) Configurations Application Examples * Hospital Beds * HVAC * Respiratory Systems * Process Control ORDERING INFORMATION
Device Case MPX Series Packing Device Options Type No. Order No. Options Marking SMALL OUTLINE PACKAGE (MPXV5010G SERIES) Basic Gauge, Element Only, SMT 482 MPXV5010G6U Rails MPXV5010G Elements Gauge, Element Only, DIP 482B MPXV5010G7U Rails MPXV5010G Ported Gauge, Axial Port, SMT 482A MPXV5010GC6U Rails MPXV5010G Elements Gauge, Axial Port, DIP 482C MPXV5010GC7U Rails MPXV5010G Gauge, Axial Port, SMT 482A MPXV5010GC6T1 Tape & MPXV5010G Reel Gauge, Side Port, SMT 1369 MPXV5010GP Trays MPXV5010G Gauge, Dual Port, SMT 1351 MPXV5010DP Trays MPXV5010G UNIBODY PACKAGE (MPX2202 SERIES) Basic Differential 867 MPX5010D -- MPXV5010D Element Ported Differential, Gauge 867C MPX5010DP -- MPXV5010DP Elements Gauge 867B MPX5010GP -- MPXV5010GP Gauge, Axial 867E MPX5010GS -- MPXV5010D Gauge, Axial PC Mount 867F MPX5010GSX -- MPXV5010D
MPX5010 MPXV5010G SERIES
INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 to 4.7 V OUTPUT SMALL OUTLINE PACKAGE
MPXV5010G6U CASE 482-01
J
MPXV5010GC6U/C6T1 CASE 482A-01
MPXV5010G7U CASE 482B-03
MPXV5010GC7U CASE 482C-03
MPXV5010GP CASE 1369-01
MPXV5010DP CASE 1351-01
UNIBODY PACKAGE PIN NUMBERS(1)
1 2 3 Vout Gnd VS 4 5 6 N/C N/C N/C
1. Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
SMALL OUTLINE PACKAGE PIN NUMBERS(1)
1 2 3 4 N/C VS Gnd Vout 5 6 7 8 N/C N/C N/C N/C
1. Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
UNIBODY PACKAGES
MPX5010D CASE 867-08
MPX5010GP CASE 867B-04
MPX5010DP CASE 867C-05
MPX5010GS CASE 867E-03
MPX5010GSX CASE 867F-03
(c) Freescale Semiconductor, Inc., 2007. All rights reserved.
VS
Sensing Element
Thin Film Temperature Compensation and Gain Stage #1
Gain Stage #2 and Ground Reference Shift Circuitry
Vout
GND
Pins 1 and 5 through 8 are NO CONNECTS for surface mount package Pins 4, 5, and 6 are NO CONNECTS for unibody package
Figure 1. Fully Integrated Pressure Sensor Schematic
Table 1. Maximum Ratings(1)
Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 75 -40 to +125 -40 to +125 Unit kPa C C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
MPX5010 2 Sensors Freescale Semiconductor
Table 2. Operating Characteristics (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 3 required to meet specification.)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Minimum Pressure Offset(3) @ VS = 5.0 Volts Full Scale Output(4) @ VS = 5.0 Volts Full Scale Span(5) @ VS = 5.0 Volts Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output Warm-Up Time(8) Offset Stability(9) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. (0 to 85C) Symbol POP VS Io Voff Min 0 4.75 -- 0 Typ -- 5.0 5.0 0.2 Max 10 5.25 10 0.425 Unit kPa Vdc mAdc Vdc
(0 to 85C)
VFSO
4.475
4.7
4.925
Vdc
(0 to 85C)
VFSS
4.275
4.5
4.725
Vdc
(0 to 85C)
-- V/P tR IO+ -- --
-- -- -- -- -- --
-- 450 1.0 0.1 20 0.5
5.0 -----------
%VFSS mV/kPa ms mAdc ms %VFSS
Table 3. Mechanical Characteristics
Characteristics Weight, Basic Element (Case 867) Weight, Basic Element (Case 482) Typ 4.0 1.5 Unit grams grams
MPX5010 Sensors Freescale Semiconductor 3
ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
The performance over temperature is achieved by integrating the shear-stress strain gauge, temperature compensation, calibration and signal conditioning circuitry onto a single monolithic chip. Figure 2 illustrates the Differential or Gauge configuration in the basic chip carrier (Case 482). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX5010 and MPXV5010G series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 3 shows the recommended decoupling circuit for interfacing the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended. Figure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit shown in Figure 3. The output will saturate outside of the specified pressure range.
Fluoro Silicone Gel Die Coat P1 Wire Bond Lead Frame
Die
Stainless Steel Cap
+5 V
Thermoplastic Case
Vout Vs IPS 1.0 F 0.01 F GND
OUTPUT
470 pF
P2 Differential Sensing Element
Die Bond
Figure 2. Cross-Sectional Diagram SOP (not to scale)
Figure 3. Recommended Power Supply Decoupling and Output Filtering (For additional output filtering, please refer to Application Note AN1646.)
5.0 4.5 4.0 3.5 3.0 Output (V) 2.5 2.0 1.5 1.0 0.5 0 0 1 2 3 4 5 6 7 8 9 10 11 MAX MIN TYPICAL Transfer Function: Vout = VS*(0.09*P+0.04) ERROR VS = 5.0 Vdc TEMP = 0 to 85C
Differential Pressure (kPa)
Figure 4. Output versus Pressure Differential
MPX5010 4 Sensors Freescale Semiconductor
Transfer Function (MPX5010, MPXV5010G)
Nominal Transfer Value: Vout = VS x (0.09 x P + 0.04)
(Pressure Error x Temp. Factor x 0.09 x VS) VS = 5.0 V 0.25 Vdc
Temperature Error Band
MPX5010, MPXV5010G SERIES
4.0 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 140 Temperature in C NOTE: The Temperature Multiplier is a linear response from 0 to -40C and from 85 to 125C. Temp -40 0 to 85 +125 Multiplier 3 1 3
Pressure Error Band
0.5 0.4 0.3 Pressure Error (kPa) 0.2 0.1 0 -0.1 -0.2 -0.3 -0.4 -0.5 Pressure 0 to 10 (kPa) Error (Max) 0.5 (kPa) 0 1 2 3 4 5 6 7 8 9 10 Pressure (kPa)
MPX5010 Sensors Freescale Semiconductor 5
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from harsh media. The MPX pressure
Part Number MPX5010D MPX5010DP MPX5010GP MPX5010GS MPX5010GSX MPXV5010G6U MPXV5010G7U MPXV5010GC6U/T1 MPXV5010GC7U MPXV5010GP MPXV5010DP
sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below:
Case Type 867 867C 867B 867E 867F 482 482B 482A 482C 1369 1351 Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Side with Port Attached Side with Port Attached Stainless Steel Cap Stainless Steel Cap Side with Port Attached Side with Port Attached Side with Port Attached Side with Part Marking
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS
Surface mount board layout is a critical portion of the total design. The footprint for the surface mount packages must be the correct size to ensure proper solder connection interface between the board and the package. With the correct footprint, the packages will self align when subjected to a solder reflow process. It is always recommended to design boards with a solder mask layer to avoid bridging and shorting between solder pads.
0.660 16.76
0.100 TYP 8X 2.54
0.060 TYP 8X 1.52
0.300 7.62
0.100 TYP 8X 2.54
inch mm
SCALE 2:1
Figure 5. SOP Footprint (Case 482)
MPX5010 6 Sensors Freescale Semiconductor
PACKAGE DIMENSIONS
-A4 5
D 8 PL 0.25 (0.010)
M
TB
S
A
S
-BG
8 1
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT. INCHES MIN MAX 0.415 0.425 0.415 0.425 0.212 0.230 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0 7 0.405 0.415 0.709 0.725 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 5.38 5.84 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0 7 10.29 10.54 18.01 18.41
S
N C H -TPIN 1 IDENTIFIER SEATING PLANE
J K M
DIM A B C D G H J K M N S
CASE 482-01 ISSUE O SMALL OUTLINE PACKAGE
-A4 5
D
8 PL
0.25 (0.010)
M
TB
S
A
S
N
-BG
8 1
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT. INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0 7 0.444 0.448 0.709 0.725 0.245 0.255 0.115 0.125 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 12.70 13.21 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0 7 11.28 11.38 18.01 18.41 6.22 6.48 2.92 3.17
S
W
V C H J K M
PIN 1 IDENTIFIER
-TSEATING PLANE
DIM A B C D G H J K M N S V W
CASE 482A-01 ISSUE A SMALL OUTLINE PACKAGE
MPX5010 Sensors Freescale Semiconductor 7
PACKAGE DIMENSIONS
-A4 5
-BG
8 1
0.25 (0.010) S N
M
TB
D 8 PL S A
S
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT. 6. DIMENSION S TO CENTER OF LEAD WHEN FORMED PARALLEL.
DIM A B C D G J K M N S INCHES MILLIMETERS MIN MAX MIN MAX 0.415 0.425 10.54 10.79 0.415 0.425 10.54 10.79 0.210 0.220 5.33 5.59 0.026 0.034 0.66 0.864 0.100 BSC 2.54 BSC 0.009 0.011 0.23 0.28 0.100 0.120 2.54 3.05 0 15 0 15 0.405 0.415 10.29 10.54 0.540 0.560 13.72 14.22
DETAIL X
PIN 1 IDENTIFIER
C -TK M J DETAIL X
SEATING PLANE
CASE 482B-03 ISSUE B SMALL OUTLINE PACKAGE
-A4 5
N
-BG
8 1
0.25 (0.010)
M
TB
D 8 PL S A
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT. 6. DIMENSION S TO CENTER OF LEAD WHEN FORMED PARALLEL.
S DIM A B C D G J K M N S V W SEATING PLANE INCHES MILLIMETERS MAX MAX MIN MIN 10.79 0.425 10.54 0.415 10.79 0.425 10.54 0.415 13.21 0.520 12.70 0.500 0.864 0.66 0.034 0.026 0.100 BSC 2.54 BSC 0.28 0.23 0.011 0.009 3.05 2.54 0.120 0.100 15 0 15 0 11.38 0.448 11.28 0.444 14.22 0.560 13.72 0.540 6.48 6.22 0.255 0.245 3.17 2.92 0.125 0.115
DETAIL X S W
V C
PIN 1 IDENTIFIER
-TK M J DETAIL X
CASE 482C-03 ISSUE B SMALL OUTLINE PACKAGE
MPX5010 8 Sensors Freescale Semiconductor
PACKAGE DIMENSIONS
C R M B -AN
PIN 1 SEATING PLANE
1 2 3 4 5 6
POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630).
INCHES MILLIMETERS MAX MIN MAX MIN 16.00 0.595 0.630 15.11 13.56 0.514 0.534 13.06 5.59 0.200 0.220 5.08 0.84 0.027 0.033 0.68 1.63 0.048 0.064 1.22 0.100 BSC 2.54 BSC 0.40 0.014 0.016 0.36 18.42 0.695 0.725 17.65 30 NOM 30 NOM 12.57 0.475 0.495 12.07 11.43 0.430 0.450 10.92 0.090 0.105 2.29 2.66
L
-TG F D 6 PL 0.136 (0.005)
M
J S
TA
M
DIM A B C D F G J L M N R S OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN
STYLE 1: PIN 1. 2. 3. 4. 5. 6.
VOUT GROUND VCC V1 V2 VEX
STYLE 2: PIN 1. 2. 3. 4. 5. 6.
OPEN GROUND -VOUT VSUPPLY +VOUT OPEN
STYLE 3: PIN 1. 2. 3. 4. 5. 6.
CASE 867-08 ISSUE N UNIBODY PACKAGE
MPX5010 Sensors Freescale Semiconductor 9
PACKAGE DIMENSIONS
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CASE 867B-04 ISSUE G UNIBODY PACKAGE
MPX5010 10 Sensors Freescale Semiconductor
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CASE 867B-04 ISSUE G UNIBODY PACKAGE
MPX5010 Sensors Freescale Semiconductor 11
PACKAGE DIMENSIONS
NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH.
INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.182 0.194 0.310 0.330 0.248 0.278 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 4.62 4.93 7.87 8.38 6.30 7.06
P 0.25 (0.010) X R
PORT #1 POSITIVE PRESSURE (P1) PORT #2 VACUUM (P2)
M
TQ
M
-AU W L V
PORT #2 VACUUM (P2)
N
PORT #1 POSITIVE PRESSURE (P1)
-QB
PIN 1
1
2
3
4
5
6
K S
C
SEATING PLANE
DIM A B C D F G J K L N P Q R S U V W X
-T-
-TJ
SEATING PLANE
G F
D 6 PL 0.13 (0.005)
M
A
M
STYLE 1: PIN 1. 2. 3. 4. 5. 6.
VOUT GROUND VCC V1 V2 VEX
CASE 867C-05 ISSUE F UNIBODY PACKAGE
C
A
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH.
INCHES MILLIMETERS MAX MAX MIN MIN 18.28 0.720 17.53 0.690 6.48 6.22 0.245 0.255 20.82 0.780 0.820 19.81 0.84 0.69 0.027 0.033 4.72 4.52 0.178 0.186 1.63 1.22 0.048 0.064 0.100 BSC 2.54 BSC 0.41 0.36 0.014 0.016 9.53 8.76 0.345 0.375 7.87 7.62 0.310 0.300 6.10 5.59 0.220 0.240 4.93 4.62 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6.
-B-
V
PIN 1
PORT #1 POSITIVE PRESSURE (P1)
6
5
4
3
2
1
K
S G F D 6 PL 0.13 (0.005)
M
J N E -T-
DIM A B C D E F G J K N S V
TB
M
VOUT GROUND VCC V1 V2 VEX
CASE 867E-03 ISSUE D UNIBODY PACKAGE
MPX5010 12 Sensors Freescale Semiconductor
PACKAGE DIMENSIONS
-TC E A U -Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH.
DIM A B C D E F G J K N P Q R S U V INCHES MILLIMETERS MAX MIN MIN MAX 28.45 27.43 1.080 1.120 19.30 18.80 0.740 0.760 16.51 16.00 0.630 0.650 0.84 0.68 0.027 0.033 4.57 4.06 0.160 0.180 1.63 1.22 0.048 0.064 0.100 BSC 2.54 BSC 0.41 0.36 0.014 0.016 6.10 5.59 0.220 0.240 2.03 1.78 0.070 0.080 4.06 3.81 0.150 0.160 4.06 3.81 0.150 0.160 11.68 11.18 0.440 0.460 18.42 17.65 0.695 0.725 21.84 21.34 0.840 0.860 4.93 4.62 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6.
V
N B R
PORT #1 POSITIVE PRESSURE (P1)
PIN 1
-P0.25 (0.010)
M
TQ
M
6
5
4
3
2
1
S K J 0.13 (0.005)
M
TP
S
D 6 PL QS F
G
VOUT GROUND VCC V1 V2 VEX
CASE 867F-03 ISSUE D UNIBODY PACKAGE
MPX5010 Sensors Freescale Semiconductor 13
PACKAGE DIMENSIONS
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CASE 1351-01 ISSUE A SMALL OUTLINE PACKAGE
MPX5010 14 Sensors Freescale Semiconductor
PACKAGE DIMENSIONS
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CASE 1351-01 ISSUE A SMALL OUTLINE PACKAGE
MPX5010 Sensors Freescale Semiconductor 15
PACKAGE DIMENSIONS
PAGE 1 OF 2
CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE
MPX5010 16 Sensors Freescale Semiconductor
PACKAGE DIMENSIONS
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CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE
MPX5010 Sensors Freescale Semiconductor 17
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MPX5010 Rev. 11 01/2007

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